Accuracy
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Within 8 µm (0.0003") total band over full travel* (X,Y Linear)
* Applies to thermally stable system at 20° C. Checked with 50x magnification. Depending on stage loading, accuracy at maximum rated load may be less than the standard accuracy.
Electronics
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Dual LCD digital displays with full function geometric processor standard
Digital screen protractor display standard
SmartCheck® metrology software optional
Optics
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Telecentric relay lens system with fully corrected images and constant 260 mm (10.38") working clearance. Overhead light shield standard. Over-screen Fresnel lens optional
10x, 20x, 31.25x, 50x, 62.5x, and 100x lenses optional
Five position motorized turret standard
Direct projection: 200 W mercury arc standard
Surface illumination: 200 W mercury arc standard |
Screen Size
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30" (760 mm) diameter viewing area
Measuring Stage
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Standard system: 380 x 250 x 75 mm (15 x 10 x 3")
Extended travel option: 450 x 250 x 75 mm (18 x 10 x 3")
1.0 µm (0.00004") resolution
DC servo motor drive with variable speed joystick and X axis fine adjustment knob, standard
Nickel plated iron worktable with three dovetail slots
250 kg (550 lb) load capacity
Helix motion optional (through pivoting worktable)
Options
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Projectron™ auto edge detection, SmartCheck® metrology software, overhead light shield, worktable dust cover, GageFit® digital chart gages, SPC software, SmartReport® Plus data export and reporting software, surface illumination concentrator, adjustable iris assemblies, swing-away lamphouse, and harsh environment package
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